P-O-U Purifiers - Ambient:
P-O-U Purifiers - Heated Getters:
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MicroTorr Inline
MicroTorr purifiers from SAES use a variety of getter-stabilized zeolites (GSZ) developed specifically to operate at ambient temperature. The GSZ media used is specific to the bulk or specialty gas application. The large surface area of GSZ media provides high flow capability and high capacities in a small package.
The MicroTorr series purifiers are offered for most gases in a wide range of sizes to meet individual flow and purity requirements. Each purifier uses a gas-specific purification media to remove impurities to < 1 ppb. The MicroTorr line was designed with total application flexibility in mind. In addition to sizes based on flow rate, a wide variety of valve and filter configurations are also available.
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Sizing Specifications
Part Number
(Click for PDF) |
Max Flow
(slpm) |
Nominal Flow
(slpm) |
Max PSIG |
Diameter
(in [mm]) |
Face to
Face
(inches [mm]) |
Face to
Face
with valves
(inches [mm]) |
| MC1-*F |
5 |
500 sccm |
1,000 |
1.5 [38.1] |
3.31 [84.1] |
8.91 [226.3] |
| MC50-*F |
10 |
1.5 |
1,000 |
1.5 [38.1] |
5.0 [127] |
10.60 [269.2] |
| MC190-*F |
50 |
5 |
250 |
2.0 [50.8] |
8.2 [208.3] |
13.80 [350.5] |
| MC200-* |
50 |
5 |
250 |
2.0 [50.8] |
6.3 [160] |
11.90 [302.3] |
| MC400-* |
60 |
9 |
250 |
3.0 [76.2] |
8.2 [208.3] |
13.80 [350.5] |
| MC450-* |
60 |
9 |
250 |
3.0 [76.2] |
7.94 [201.7] |
13.54 [343.9] |
| MC500-* |
100 |
12 |
250 |
2.0 [50.8] |
12.5 [317.5] |
18.10 [459.7] |
| MC1500-* |
250 |
40 |
250 |
3.0 [76.2] |
18.2 [462.3] |
28.84 [732.5] |
| MC3000-* |
500 |
80 |
250 |
4.0 [101.6] |
20.0 [508.0] |
30.64 [778.3] |
| MC4500-* |
1000 |
200 |
250 |
6.0 [152.4] |
27.64 [702.6] |
38.3 [972.8] |
| MC9000-* |
1000 |
300 |
250 |
6.0 [152.4] |
39.34 [999.7] |
50.00 [1270.0] |
| HP190-*F |
50 |
5 |
1,000 |
2.0 [50.8] |
8.2 [208.3] |
13.80 [350.5] |
| HP400-*F |
60 |
9 |
1,000 |
3.0 [76.2] |
8.2 [208.3] |
13.80 [350.5] |
| SP70-*F |
40 |
1.5 |
3,000 |
2.0 [50.8] |
5.00 [127.0] |
N/A |
| SP300-*F |
200 |
10 |
3,000 |
2.0 [50.8] |
15.00 [381.0] |
N/A |
| SP600-*F |
400 |
15 |
3,000 |
2.0 [50.8] |
25.00 [635.0] |
N/A |
| PG1-*FV |
15 |
10 |
250 |
2.0 [50.8] |
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13.80 [350.5] |
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*Replace with appropriate Media Code below. Note: Not all medias are available with all purifier sizes. Please consult your sales representative.
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Media Performance
| *Media |
Gases
Purified |
Impurities
Removed |
Outlet
Performance |
| 202 |
Ar, CDA, H2, He, Kr, N2, Ne, O2, Xe |
H2O |
< 1 ppb |
| 203 |
Ar, CDA, H2, He, Kr, N2, Ne, O2, Xe |
H2O, CO2,
Acids, Bases, Organics, Refractory Compounds* |
< 10 ppt |
| 206 |
CO |
H2O |
< 1 ppb |
| 402 |
AsH3 |
H2O, O2 |
< 1 ppb |
| 403 |
CDA |
Acids, Bases, Organics, Refractory Compounds* |
< 10 ppt |
| 404 |
CO2, C2H2 (Acetylene) |
NMHC |
< 1 ppb |
| 502 |
PH3 |
H2O, O2 |
< 1 ppb |
| 702 |
DMHz, NH3 |
H2O, O2, CO2 |
< 1 ppb |
| 902 |
Ar, He, Kr, N2, Ne, Xe |
H2O, O2, CO, CO2, H2 NMHC |
< 1 ppb |
| 903 |
Ar, He, Kr, N2, Ne, Xe |
O2, H2O, CO, CO2, H2,
Acids, Bases, Organics, Refractory Compounds* |
< 10 ppt |
| 904 |
H2 |
H2O, O2, CO, CO2, NMHC |
< 1 ppb |
| 905 |
C2F6, C2H6, C3F8, C3H8, C2F4H2, C4F8, C4H10, CCl4, CF4, CH4, CHF3, SF6 |
H2O, O2, CO, CO2, H2 NMHC |
< 1 ppb |
| 906 |
CDA, O2 |
H2O, CO, CO2, NMHC |
< 1 ppb |
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