Phosphine Gas Ambient Temperature Purification
MicroTorr ambient temperature gas purifiers are designed to remove impurities from many different gases, including nitrogen, rare gases, bydrogen, ammonia, arsine and phosphine, HCl, and many others. Impurities in these gases are reduced to less than 1 part-per-billion, in most cases.


Model Number Configuration (Example MC50-502FV)
MC50 -502 -FV
Model Size Media Options

Model Size
Model Nominal Flow(1) Max Flow(1) Max PSIG Specifications
MC1 0.5 slpm 5 slpm 1000 psig Datasheet
MC50 1.5 slpm 10 slpm 1000 psig Datasheet
MC190 5 slpm 50 slpm 250 psig Datasheet
MC200 5 slpm 50 slpm 250 psig Datasheet
MC400 9 slpm 60 slpm 250 psig Datasheet
MC450 10 slpm 75 slpm 250 psig Datasheet
MC500 12 slpm 100 slpm 250 psig Datasheet
MC1500 40 slpm 250 slpm 250 psig Datasheet
MC3000 80 slpm 500 slpm 250 psig Datasheet
PG1(2) 10 slpm 15 slpm 250 psig Datasheet
(1) Flowrates stated without optional filters or valves
(2) PG1 come standard with .003 μm filter and valves (see datasheet).
Media Types for Phosphine
Media Gases Purified Impurities Removed Outlet Performance
502 PH3 H2O, O2 < 1 ppb

Options
Option Description Comments
F 0.003 μm filter option 2 μm filter standard
V Inlet and outlet valves 1/4" Manual diaphragm. (Not available on SP models.)

© 2025 Rainer Lammertz