Gases to be purified
Info:
|
|
Other Gases Purifiers
Organics < 1ppb
0 - 1000 slpm
H2O, O2, CO2, Acids, Bases, Organics, Refractory Compounds Removal < 1ppb
0 - 1000 slpm
H2O, O2 Removed < 1 ppb
0 - 125 slpm
 Xenon, Neon, Krypton: Heated Getter Purifiers
H2O, O2, CO, CO2, H2, N2, THC Removal < 1ppb
H2O, O2, CO, CO2, H2, NMHC Removal < 1ppb
Also available: Acids, Bases, Refractory Compounds Removal
0 - 1000 slpm
[C2F6, C2H6, C3F8, C3H8, C2F4H2, C4F8, C4H10, CCl4, CF4, CH4, CHF3, SF6 ]
H2O, O2, CO, CO2, H2, NMHC Removal < 1ppb
0 - 1,000 slpm
[B2H6, BCl3, CClH3, Cl2, CO2, GeCl4, GeH4, H2S, H2Se, HBr, HCl, N2O, NF3, NO, SiCl4, SiF4, SiH2Cl2, SiHCl3, SO2, CHClF2, BF3 ]
H2O Removal < 1ppb
0 - 500 slpm
H2O, O2, CO, CO2, H2, NMHC Removal < 1ppb
Wall mounted canister (FaciliTorr)
H2O, O2, CO, CO2, H2, NMHC Removal < 1ppb
Floor mounted column in a frame (PS14 MegaTorr)
| |
