The adsorber only approach
is ideal for applications where N2 and CH4 impurity removal is not required.
The MegaTorr Adsorber
Only Hydrogen Gas Purifier utilizes catalytic and adsorption processes to
provide ultra-high purity (UHP) gas for semiconductor applications. Outlet
impurity levels for O2, CO, CO2 & H2O are reduced to low parts per billion
(ppb) levels.
The ambient temperature
adsorber/catalyst vessels remove O2, CO, CO2 and H2O. The twin adsorber/catalyst
vessels alternate between purify and regeneration mode providing continuous
purification. Rregeneration is accomplished by backflushing with purified
hydrogen at elevated temperatures.
MegaTorr PS7 Adsorber Only Hydrogen Purifiers |
| Model | Flow Rate | Dimensions | Outlet |
| PS7-MGT20-H | 20 Nm3/hr | 203 x 157 x 117 cm
(80'' x 62'' x 46'') |
| common to all: |
| H2O | < 1 ppb |
| O2 | < 1 ppb |
| CO | < 1 ppb |
| CO2 | < 1 ppb |
contact factory
for further details |
|
| PS7-MGT40-H | 40 Nm3/hr | 203 x 157 x 117 cm
(80'' x 62'' x 46'') |
| PS7-MGT100-H | 100 Nm3/hr | 198 x 132 x 163 cm
(78'' x 52'' x 64'') |
| PS7-MGT200-H | 200 Nm3/hr | 198 x 130 x 160 cm
(78'' x 51'' x 63'') |
| *all models above are designated with a -S7 suffix |
| 
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