Gases to be purified
Info:
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Hydrogen Bulk Gas Purifier PS7-A (Adsorber Beds Only)
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The MegaTorr Hydrogen gas purifier with only adsorbers is ideal for applications where N2 and CH4 impurity removal is not required.
This PS7 MegaTorr Hydrogen purifier utilizes catalytic and adsorption processes to provide ultra-high purity (UHP) Hydrogen gas for semiconductor applications. Outlet impurity levels for O2, CO, CO2, NMHC & H2O are reduced to below parts per billion (ppb) levels. The two adsorber vessels alternate between purify and regeneration mode, providing continuous purification. Regeneration is accomplished by backflushing with purified Hydrogen at elevated temperatures.
Standard Features:
- Automated Microprocessor Controller
- HMI (Human Machine Interface)
- Password Protected Control System
- System Alarms
- H2 Leak Detection Sensor
- Vented Cabinet Purge
- Over Pressurization Safety Relief System
- High Temperature Hardware Interlocks
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Optional Features:
- Inlet and Outlet Pressure Transducers
- Mass flow meter with 4-20mA Output
- Auto or Manual Bypass
- Instrument Air Management System
- Ultrafine 0.003 micron Particle Filter
- Separate Control Power
- UPS - Uninterruptible Power Supply
- MODBUS Data Communication Port
- Inert Gas piping system purge
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PS7 Adsorber Only - Performance |
| Gases Purified | Impurities Removed | Outlet Performance |
| H2 | H2O, O2, CO, CO2, NMHC | < 1 ppb |
PS7 Specifications |
| Model | Maximum Flow
(Nm3/hr) | Maximum Pressure Drop
(bar) | Dimensions (cm) | Weight
(kg) |
| H | W | D |
| PS7-MGS10-A - PS7-MGS40-A | 10 - 40 | 0.7 | 138 | 80 | 40 | <110 |
| PS7-MGS50-A - PS7-MGS60-A | 50 - 60 | 0.7 | 168 | 87 | 61 | <180 |
| PS7-MGS90-A - PS7-MGS120-A | 90 - 120 | 0.7 | 199 | 92 | 69 | <300 |
| PS7-MGT200-A | 200 | 0.7 | 208 | 130 | 163 | <1361 |
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