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The MegaTorr PS6 Series
Oxygen Gas purifiers sport an enhanced, optimized design providing sub ppb
performance in a small footprint. SAES Pure Gas has drawn on years of experience
in Ultra High Purity piping design, advanced process material analysis, and
state of the art integrated control systems to develop a new family of purifiers
to meet the needs of low capital cost, high reliability and high performance.
The PS6-MGT series produce
ultra-high purity (UHP) gas for critical semiconductor applications. Through a
combination of catalytic and adsorbtion processes, outlet impurity levels for
CO, CO2, CH4, H2, and H2O are reduced to sub parts per billion (ppb) levels.
Hydrocarbons (CH4), CO and H2 react at elevated temperatures with O2 in the
oxidizing catalyst vessel to form CO2 and H2O which are then removed in the
ambient temperature downstream adsorber vessels. The adsorber vessels alternate
between purify and regeneration mode providing continuous purification. Adsorber
regeneration is accomplished by backflushing with purified oxygen at elevated
temperatures.
MegaTorr PS6 Oxygen Purifiers |
| Model | Flow Rate | Dimensions | Outlet |
| PS6-MGT15-O | 15 Nm3/hr | 196 x 89 x 86 cm
77'' x 35'' x 34'' | common to all:
H2O < 1 ppb
CO < 1 ppb
CO2 < 1 ppb
H2 < 1 ppb
CH4 < 1 ppb
contact factory
for further details |
| PS6-MGT30-O | 30 Nm3/hr | 196 x 89 x 86 cm
77'' x 35'' x 34'' |
| PS6-MGT60-O | 60 Nm3/hr | 196 x 89 x 137 cm
77'' x 35'' x 54'' |
| PS6-MGT100-O | 100 Nm3/hr | 196 x 89 x 137 cm
77'' x 35'' x 54'' |
| PS6-MGT200-O | 200 Nm3/hr | 196 x 89 x 137 cm
77'' x 35'' x 54'' |
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