The PS5 MegaTorr Rare Gas purifiers are a heated getter-based purifiers designed specifically to provide ultra-high purity (UHP) gas for semiconductor applications.
The patented getter alloy operates at elevated temperatures to remove impurities by forming irreversible chemical bonds. Impurities removed will not be released under any circumstances when the purifier is operated within specification. Outlet impurity levels for O2, H2O, CO, CO2, H2, CH4 and N2 (where applicable) are reduced to parts per trillion concentrations.
Downstream of the heated getter columns, hydrogen impurities are removed by a patented secondary ambient temperature getter cartridge, known as the Hydrogen Removal Unit (HRU).
Fully automatic operation is provided standard with the microprocessor-based controller and full instrumentation. Multi-tiered fault protection keeps gas flowing while alerting the operator of any problems. Long getter life is achieved through efficient getter bed designs, which safely optimize operating temperature, bed dimensions and flow rates. For the PS5 platform only electrical power and pneumatic air supply is needed to operate the purifier.
The PS5 can be installed into small areas because of the compact design and front/rear access (zero-side clearance acceptable). The PS5 comes standard with GettSafe™ – the state-of-the-art solution to fast-response thermal protection. GettSafe quickly detects excessive heat in the getter column, and the built-in discrete hardware interlock takes action to isolate the purifier.
Standard features include UHP particle filter, customer interface fault relays, pneumatic system reserve accumulator and control system backup battery for increased reliability and performance. The PS5 can be fitted with all MegaTorr options including mass flow meters and pressure transducers.
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