Research has shown that gas purification ensures consistent and repeatable process performance for semiconductor device manufacturing. Purification isolates critical process areas from house gas distribution systems and protects against gas purity upsets and cross-contamination.

The MonoTorr Phase I 3000 provides essential purification for nitrogen and rare gases at flow rates to 5 slpm. The all metal getter material removes impurities to < 1 ppb (refer to chart below).