The PS15 Series MonoTorr gas purifiers, available for CDA and oxygen service, decrease hydrocarbon, carbon monoxide, and hydrogen impurities to less than 1 ppb.

The purification process is a catalytic oxidation of reducing species, namely CH4, NMHC (non-methane hydrocarbons), CO and H2.

If CO2 and/or H2O removal is required, then a purifier/dryer, such as the MicroTorr PS11-MC400, MC9000, or MCD9000 can be installed downstream.

The PS15 series is designed for continuous uninterrupted operation, with no consumable components. Under normal use, there is no need to ever replace or regenerate the purification column. Thus, there is no need for an end point detection device, allowing for simple installation and operation.

The PS15 Series MonoTorr purifiers are ideally suited for Optical Fiber Manufacturing, Photolithography, and Mask Pattern Generation.